Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342198 | Processing liquid supplying apparatus and processing liquid supplying method | Kousuke Yoshihara, Koji Takayanagi, Toshinobu Furusho, Takashi Sasa | 2022-05-24 |
| 10901320 | Developing method, developing apparatus, and computer-readable recording medium | Tomohiro Iseki, Hirofumi Takeguchi | 2021-01-26 |
| 10734251 | Liquid processing apparatus, liquid processing method, and storage medium for liquid process | Koji Takayanagi, Yukie Minekawa, Yuichi Yoshida, Kousuke Yoshihara, Toshinobu Furusho +1 more | 2020-08-04 |
| 10262880 | Cover plate for wind mark control in spin coating process | Derek Bassett, Wallace P. Printz, Joshua Hooge, Katsunori Ichino, Kousuke Yoshihara | 2019-04-16 |
| 10120286 | Developing method, developing apparatus, and computer-readable recording medium | Tomohiro Iseki, Hirofumi Takeguchi | 2018-11-06 |
| 10101669 | Exposure apparatus, resist pattern forming method, and storage medium | Seiji Nagahara, Gousuke Shiraishi, Satoru Shimura, Kousuke Yoshihara, Shinichiro KAWAKAMI +2 more | 2018-10-16 |
| 10074546 | Processing liquid supplying apparatus and processing liquid supplying method | Kousuke Yoshihara, Koji Takayanagi, Toshinobu Furusho, Takashi Sasa | 2018-09-11 |
| 10022652 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2018-07-17 |
| 9972512 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Teruhiko Kodama | 2018-05-15 |
| 9952512 | Developing method, developing apparatus, and computer-readable storage medium | Hirofumi Takeguchi, Tomohiro Iseki | 2018-04-24 |
| 9899243 | Light irradiation apparatus | Masahide Tadokoro, Gousuke Shiraishi, Tomohiro Iseki, Masaru Tomono, Hironori Mizoguchi | 2018-02-20 |
| 9878267 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2018-01-30 |
| 9786488 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Teruhiko Kodama | 2017-10-10 |
| 9731226 | Solution treatment apparatus and solution treatment method | Kousuke Yoshihara, Katsunori Ichino, Toshinobu Furusho, Takashi Sasa, Katsuhiro Tsuchiya +1 more | 2017-08-15 |
| 9732910 | Processing-liquid supply apparatus and processing-liquid supply method | Koji Takayanagi, Kousuke Yoshihara, Toshinobu Furusho, Takashi Sasa | 2017-08-15 |
| 9690202 | Developing method, developing apparatus and storage medium | Hirofumi Takeguchi, Takeshi Shimoaoki, Kousuke Yoshihara, Tomohiro Iseki | 2017-06-27 |
| 9613836 | Coating film forming apparatus, coating film forming method, and recording medium | Katsunori Ichino, Kousuke Yoshihara | 2017-04-04 |
| 7601933 | Heat processing apparatus and heat processing method | Kousuke Yoshihara, Momoko Shizukuishi, Atsushi Ookouchi, Hideharu Kyouda | 2009-10-13 |
| 7384595 | Heat-treating apparatus and heat-treating method | Kazuhiko Ooshima, Momoko Shizukuishi, Hideo Shite, Kousuke Yoshihara | 2008-06-10 |
| 6869640 | Coating film forming method and coating film forming apparatus | Kousuke Yoshihara | 2005-03-22 |