Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12228390 | Information processing apparatus, information processing method and computer-readable recording medium | Masashi Enomoto, Toyohisa Tsuruda, Hiroshi Nakamura, Kazuhiro Shiba | 2025-02-18 |
| 12123778 | Thermal imaging sensor for integration into track system | Michael A. Carcasi, Kazuhiro Shiba, Masashi Enomoto, Toyohisa Tsuruda | 2024-10-22 |
| 12051587 | Substrate processing apparatus, estimation method of substrate processing and recording medium | Hiroshi Nakamura, Masashi Enomoto | 2024-07-30 |
| 11809091 | Substrate processing apparatus and processing condition adjustment method | Masashi Enomoto, Kentaro Yamamura | 2023-11-07 |
| 11703459 | System and method to calibrate a plurality of wafer inspection system (WIS) modules | Michael A. Carcasi, Hiroyuki Iwaki, Toyohisa Tsuruda | 2023-07-18 |
| 11637031 | Systems and methods for spin process video analysis during substrate processing | Michael A. Carcasi, Joshua Hooge, Mark H. Somervell, Hiroyuki Iwaki, Masashi Enomoto +2 more | 2023-04-25 |
| 11474028 | Systems and methods for monitoring one or more characteristics of a substrate | Michael A. Carcasi, Mark H. Somervell, Joshua Hooge | 2022-10-18 |
| 11062899 | Coated film removing apparatus | Takafumi Hasimoto, Taku Nagakane, Koji Takayanagi | 2021-07-13 |
| 10649335 | Substrate processing apparatus, substrate processing method and storage medium | Teruhiko Kodama, Masashi Enomoto, Takafumi Hashimoto | 2020-05-12 |
| 9899243 | Light irradiation apparatus | Yuichi Terashita, Gousuke Shiraishi, Tomohiro Iseki, Masaru Tomono, Hironori Mizoguchi | 2018-02-20 |
| 8927906 | Heating device, coating/developing system, heating method, coating/developing method, and recording medium having program for executing heating method or coating/developing method | Yoshihiro Kondo, Takashi Saito | 2015-01-06 |
| 8698052 | Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate | Ryoichi Uemura, Mitsuteru Yano, Shinichi Shinozuka | 2014-04-15 |
| 8308381 | Substrate processing method, computer-readable storage medium, and substrate processing system | Kunie Ogata | 2012-11-13 |
| 8253077 | Substrate processing method, computer-readable storage medium and substrate processing system | Kunie Ogata, Tsuyoshi Shibata, Shinichi Shinozuka | 2012-08-28 |
| 8242417 | Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate | Ryoichi Uemura, Mitsuteru Yano, Shinichi Shinozuka | 2012-08-14 |
| 8135487 | Temperature setting method and apparatus for a thermal processing plate | Megumi Jyousaka, Yoshitaka Konishi, Shinichi Shinozuka, Kunie Ogata | 2012-03-13 |
| 7985516 | Substrate processing method, computer-readable storage medium and substrate processing system | Kunie Ogata, Tsuyoshi Shibata, Shinichi Shinozuka | 2011-07-26 |
| 7968260 | Substrate processing method, computer-readable storage medium, and substrate processing system | Kunie Ogata | 2011-06-28 |
| 7957828 | Temperature setting method for thermal processing plate, temperature setting apparatus for thermal processing plate, and computer-readable storage medium | Megumi Jyousaka, Yoshitaka Konishi, Shinichi Shinozuka, Kunie Ogata | 2011-06-07 |
| 7910863 | Temperature setting method of thermal processing plate, computer-readable recording medium recording program thereon, and temperature setting apparatus for thermal processing plate | Megumi Jyousaka, Hiroshi Tomita | 2011-03-22 |
| 7902485 | Temperature setting method of thermal processing plate, temperature setting apparatus of thermal processing plate, program, and computer-readable recording medium recording program thereon | Megumi Jyousaka, Hiroshi Tomita | 2011-03-08 |
| 7867674 | Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program | Michio Tanaka, Shinichi Shinozuka, Kunie Ogata, Hiroshi Tomita, Ryoichi Uemura | 2011-01-11 |
| 7715952 | Temperature setting of thermal processing plate using zernike coefficients | Megumi Jyousaka, Hiroshi Tomita | 2010-05-11 |
| 7643126 | Method of setting focus condition at time of exposure, apparatus for setting focus condition at time of exposure, program, and computer readable recording medium | Michio Tanaka | 2010-01-05 |
| 7420650 | Method of setting processing condition in photolithography process, apparatus for setting processing condition in photolithography process, program, and computer readable recording medium | Michio Tanaka | 2008-09-02 |