Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409470 | Substrate processing apparatus and substrate processing method | Koichi Matsunaga, Hideaki Iwasaka | 2025-09-09 |
| 12230515 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Yasushi Takiguchi | 2025-02-18 |
| 11887869 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Yasushi Takiguchi | 2024-01-30 |
| 11693319 | Substrate processing method, substrate processing apparatus, and storage medium | Keiichi Tanaka, Kosuke Yoshihara, Yoshihiro Kondo, Makoto Muramatsu | 2023-07-04 |
| 11554389 | Substrate cleaning apparatus and substrate cleaning method | Akihiro Kubo, Yasushi Takiguchi, Yoshiki Okamoto | 2023-01-17 |
| 11532487 | Substrate processing apparatus | Akihiro Kubo, Yasushi Takiguchi, Yoshiki Okamoto, Hayato Hosaka | 2022-12-20 |
| 11287798 | Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate | Masashi Enomoto | 2022-03-29 |
| 11139182 | Substrate processing apparatus and substrate processing method | Nobuhiko Mouri, Takanori Obaru, Yasushi Takiguchi | 2021-10-05 |
| 11126086 | Substrate treatment apparatus, substrate treatment method, and computer storage medium | Koichi Matsunaga | 2021-09-21 |
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Yasushi Takiguchi, Taro Yamamoto, Yoshiki Okamoto, Hayato Hosaka, Akihiro Kubo +3 more | 2020-11-17 |
| 10649335 | Substrate processing apparatus, substrate processing method and storage medium | Masashi Enomoto, Masahide Tadokoro, Takafumi Hashimoto | 2020-05-12 |
| 10528028 | Substrate processing apparatus, substrate processing method and memory medium | Masashi Enomoto | 2020-01-07 |
| 10074542 | Substrate processing method and substrate processing apparatus | Akihiro Kubo | 2018-09-11 |
| 9972512 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita | 2018-05-15 |
| 9786488 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Takafumi Niwa, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita | 2017-10-10 |
| 9711419 | Substrate backside texturing | Carlos A. Fonseca, Benjamen M. Rathsack, Jeffrey Smith, Anton J. deVilliers, Lior Huli +1 more | 2017-07-18 |
| 9601394 | Substrate processing apparatus, substrate processing method and memory medium | Masashi Enomoto | 2017-03-21 |