Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12409470 | Substrate processing apparatus and substrate processing method | Teruhiko Kodama, Hideaki Iwasaka | 2025-09-09 |
| 12116670 | Substrate processing method and substrate processing apparatus | — | 2024-10-15 |
| 11126086 | Substrate treatment apparatus, substrate treatment method, and computer storage medium | Teruhiko Kodama | 2021-09-21 |
| 10015932 | Plant management system and plant management method | Jun Ohshimo | 2018-07-10 |
| 9418834 | System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrate | Ainhoa Romo Negreira, Kathleen Nafus, Yuhei Kuwahara | 2016-08-16 |
| 7385005 | Polyvinylacetal resin and process for producing the same | Yoshihiro Mashiko, Toshiaki Kawanishi, Manabu Tsuzuki, Kazumasa Matsuoto, Koki Goto +1 more | 2008-06-10 |
| 6130831 | Positive-negative pulse type high frequency switching power supply unit | — | 2000-10-10 |