KN

Kathleen Nafus

TL Tokyo Electron Limited: 7 patents #1,084 of 5,567Top 20%
Overall (All Time): #713,330 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
11538684 UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly Mark H. Somervell, Ian J. Brown, Ihsan Simms, Ainhoa Romo Negreira 2022-12-27
10490402 UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly Mark H. Somervell, Ian J. Brown, Ihsan Simms, Ainhoa Romo Negreira 2019-11-26
10438806 Methods and system of using organosilicates as patterning films Serge Biesemans 2019-10-08
9418834 System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrate Ainhoa Romo Negreira, Yuhei Kuwahara, Koichi Matsunaga 2016-08-16
7673278 Enhanced process yield using a hot-spot library Benjamen M. Rathsack, Steven Scheer 2010-03-02
7582414 Method and system for drying a substrate Chung-Peng Ho, Kaz Yoshioka, Richard Yamaguchi 2009-09-01
7070915 Method and system for drying a substrate Chung-Peng Ho, Kaz Yoshioka, Richard Yamaguchi 2006-07-04