YK

Yuhei Kuwahara

TL Tokyo Electron Limited: 2 patents #2,602 of 5,567Top 50%
Overall (All Time): #2,012,404 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
9418834 System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrate Ainhoa Romo Negreira, Kathleen Nafus, Koichi Matsunaga 2016-08-16
8367308 Substrate processing method Hiroshi Nakamura, Takafumi Niwa, Tadatoshi Tomita 2013-02-05