Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12404587 | Substrate processing apparatus and substrate processing method | Yuichiro Inatomi, Yusaku Hashimoto | 2025-09-02 |
| 11873723 | Steam turbine plant and method for cleaning same | Daiki FUJIMURA, Ayumu Kuroshima, Motohiro GOSHIMA | 2024-01-16 |
| 10672606 | Coating film forming method, coating film forming apparatus, and storage medium | Kousuke Yoshihara | 2020-06-02 |
| 10642168 | Auxiliary exposure apparatus and exposure amount distribution acquisition method | Hideaki Kashiwagi, Norihisa Koga | 2020-05-05 |
| 10068763 | Coating film forming method, coating film forming apparatus, and storage medium | Kousuke Yoshihara | 2018-09-04 |
| 9972512 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita, Teruhiko Kodama | 2018-05-15 |
| 9786488 | Liquid processing method, memory medium and liquid processing apparatus | Akiko Kai, Shogo Takahashi, Hiroshi Nishihata, Yuichi Terashita, Teruhiko Kodama | 2017-10-10 |
| 8367308 | Substrate processing method | Hiroshi Nakamura, Yuhei Kuwahara, Tadatoshi Tomita | 2013-02-05 |
| 8110325 | Substrate treatment method | Hiroshi Nakamura, Hideharu Kyouda | 2012-02-07 |
| 5851620 | Disc metal mold and recorded disc | Hiroshi Nakajima, Tetsuya Hasegawa | 1998-12-22 |