Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524383 | Substrate processing apparatus, substrate processing method, and computer-readable recording medium | Minoru Kubota | 2022-12-13 |
| 11031261 | Liquid processing apparatus | Yasushi Takiguchi, Koki Yoshimura, Taro Yamamoto, Koshi MUTA | 2021-06-08 |
| 10289004 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi | 2019-05-14 |
| 10120285 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda | 2018-11-06 |
| 10014190 | Liquid processing apparatus | Yasushi Takiguchi, Koki Yoshimura, Taro Yamamoto, Koshi MUTA | 2018-07-03 |
| 9947556 | Substrate cleaning apparatus, substrate cleaning method, and storage medium | Yasushi Takiguchi, Taro Yamamoto, Koshi MUTA | 2018-04-17 |
| 9575411 | Developing apparatus, developing method and storage medium | Kousuke Yoshihara, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi | 2017-02-21 |
| 9568829 | Developing method, developing apparatus and storage medium | Kousuke Yoshihara, Koshi MUTA, Taro Yamamoto, Yasushi Takiguchi, Masahiro Fukuda | 2017-02-14 |
| 9214363 | Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method | Taro Yamamoto | 2015-12-15 |
| 8757089 | Coating and developing apparatus, coating and developing method, and storage medium | Kouichi Hontake | 2014-06-24 |
| 8703400 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Kenji Tsutsumi, Junichi Kitano, Osamu Miyahara | 2014-04-22 |
| 8518494 | Coating and developing apparatus, coating film forming method, and storage medium storing program for performing the method | Taro Yamamoto | 2013-08-27 |
| 8445189 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hirofumi Takeguchi, Atsushi Ookouchi | 2013-05-21 |
| 8366872 | Substrate treatment method, coating film removing apparatus, and substrate treatment system | Kenji Tsutsumi, Junichi Kitano, Osamu Miyahara | 2013-02-05 |
| 8163469 | Coating and developing apparatus, coating and developing method, and storage medium | Kouichi Hontake | 2012-04-24 |
| 8111372 | Coating film forming apparatus and coating film forming method for immersion light exposure | Junichi Kitano, Taro Yamamoto | 2012-02-07 |
| 8110325 | Substrate treatment method | Takafumi Niwa, Hiroshi Nakamura | 2012-02-07 |
| 8083959 | Substrate processing method, substrate processing system, and computer-readable storage medium | Junichi Kitano, Osamu Miyahara, Kenji Tsutsumi | 2011-12-27 |
| 8037890 | Substrate cleaning device and substrate cleaning method | Taro Yamamoto, Tetsu Kawasaki, Satoru Shimura | 2011-10-18 |
| 8026048 | Developing apparatus and developing method | Atsushi Ookouchi, Taro Yamamoto, Hirofumi Takeguchi, Kousuke Yoshihara | 2011-09-27 |
| 8010221 | Cleaning apparatus and method for immersion light exposure | Kouichi Hontake, Masashi Enomoto | 2011-08-30 |
| 7959988 | Coating film forming apparatus and method | Taro Yamamoto, Yasushi Takiguchi, Akihiro Fujimoto, Junichi Kitano, Osamu Miyahara +1 more | 2011-06-14 |
| 7926441 | Substrate treatment method, coating treatment apparatus, and substrate treatment system | Kenji Tsutsumi, Junichi Kitano, Osamu Miyahara | 2011-04-19 |
| 7918182 | Developing device and developing method | Taro Yamamoto, Kousuke Yoshihara, Hirofumi Takeguchi, Atsushi Ookouchi | 2011-04-05 |
| 7823534 | Development device and development method | Atsushi Ookouchi, Taro Yamamoto, Hirofumi Takeguchi, Kousuke Yoshihara | 2010-11-02 |