Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7742146 | Coating and developing method, coating and developing system and storage medium | Kousuke Yoshihara, Taro Yamamoto | 2010-06-22 |
| 7665916 | Coater/developer and coating/developing method | Taro Yamamoto | 2010-02-23 |
| 7601933 | Heat processing apparatus and heat processing method | Kousuke Yoshihara, Yuichi Terashita, Momoko Shizukuishi, Atsushi Ookouchi | 2009-10-13 |
| 6991385 | Method for developing processing and apparatus for supplying developing solution | Kousuke Yoshihara, Keiichi Tanaka, Taro Yamamoto, Hirofumi Takeguchi, Atsushi Ookouchi | 2006-01-31 |
| 6811962 | Method for developing processing and apparatus for supplying developing solution | Kousuke Yoshihara, Keiichi Tanaka, Taro Yamamoto, Hirofumi Takeguchi, Atsushi Ookouchi | 2004-11-02 |
| 6709174 | Apparatus and method for development | Taro Yamamoto, Akihiro Fujimoto, Kousuke Yoshihara, Hirofumi Takeguchi | 2004-03-23 |
| 6496245 | Developing method and developing apparatus | Hitoshi Kosugi | 2002-12-17 |