Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8415092 | Substrate developing method, substrate processing method and developing solution supply nozzle | Hidetami Yaegashi | 2013-04-09 |
| 7846648 | Substrate developing method, substrate processing method and developing solution supply nozzle | Hidetami Yaegashi | 2010-12-07 |
| 7601933 | Heat processing apparatus and heat processing method | Kousuke Yoshihara, Yuichi Terashita, Atsushi Ookouchi, Hideharu Kyouda | 2009-10-13 |
| 7384595 | Heat-treating apparatus and heat-treating method | Kazuhiko Ooshima, Yuichi Terashita, Hideo Shite, Kousuke Yoshihara | 2008-06-10 |
| 7367710 | Developing solution supply nozzle with stirrer | Hidetami Yaegashi | 2008-05-06 |