Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12197129 | Substrate treatment method and substrate treatment system | Satoru Shimura, Soichiro Okada, Masashi Enomoto | 2025-01-14 |
| 11467497 | Method of forming mask | — | 2022-10-11 |
| 11205571 | Mask forming method | Soichiro Okada | 2021-12-21 |
| 10741444 | Method of forming film | — | 2020-08-11 |
| 10573530 | Pattern forming method | — | 2020-02-25 |
| 10539876 | Pattern forming method | — | 2020-01-21 |
| 10366888 | Pattern forming method | Kazuki Yamada, Masatoshi Yamato, Yoshitaka Komuro, Takehiro Seshimo, Katsumi Ohmori | 2019-07-30 |
| 10317797 | Pattern forming method for forming a pattern | Kenichi Oyama, Katsumi Ohmori, Yoshitaka Komuro, Takehiro Seshimo | 2019-06-11 |
| 10211050 | Method for photo-lithographic processing in semiconductor device manufacturing | Kenichi Oyama, Masatoshi Yamato, Tomohiro Iseki, Toyohisa Tsuruda | 2019-02-19 |
| 10074557 | Pattern forming method | — | 2018-09-11 |
| 9818612 | Method for manufacturing semiconductor device | — | 2017-11-14 |
| 9690185 | Substrate processing method, program, computer-readable storage medium, and substrate processing system | — | 2017-06-27 |
| 9679770 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | — | 2017-06-13 |
| 9653293 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | — | 2017-05-16 |
| 9459535 | Method of forming pattern | Naoto Motoike, Katsumi Ohmori, Toshiaki Hato, Kenichi Oyama | 2016-10-04 |
| 9418860 | Use of topography to direct assembly of block copolymers in grapho-epitaxial applications | Mark H. Somervell, Makoto Muramatsu, Benjamen M. Rathsack, Tadatoshi Tomita, Hisashi Genjima +1 more | 2016-08-16 |
| 9023225 | Pattern forming method | Kenichi Oyama | 2015-05-05 |
| 8551691 | Method of forming mask pattern | — | 2013-10-08 |
| 8415092 | Substrate developing method, substrate processing method and developing solution supply nozzle | Momoko Shizukuishi | 2013-04-09 |
| 8283253 | Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Satoru Shimura, Takashi Hayakawa | 2012-10-09 |
| 8273661 | Pattern forming method, semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Satoru Shimura | 2012-09-25 |
| 8263320 | Method, program and system for processing substrate | — | 2012-09-11 |
| 7846648 | Substrate developing method, substrate processing method and developing solution supply nozzle | Momoko Shizukuishi | 2010-12-07 |
| 7367710 | Developing solution supply nozzle with stirrer | Momoko Shizukuishi | 2008-05-06 |
| 6884298 | Method and system for coating and developing | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano | 2005-04-26 |