Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6565928 | Film forming method and film forming apparatus | Yasuhiro Sakamoto | 2003-05-20 |
| 6518199 | Method and system for coating and developing | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano | 2003-02-11 |
| 6287023 | Processing apparatus and method | Qi Hua Fan | 2001-09-11 |
| 6284044 | Film forming method and film forming apparatus | Yasuhiro Sakamoto | 2001-09-04 |
| 6097469 | Method of processing resist onto substrate and resist processing apparatus | Yasunori Kawakami, Jae Hoon Park, Keiko Kanzawa, Takayuki Katano, Takayuki Toshima +1 more | 2000-08-01 |
| 6054181 | Method of substrate processing to form a film on multiple target objects | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 2000-04-25 |
| 6017663 | Method of processing resist utilizing alkaline component monitoring | Yasunori Kawakami, Jae Hoon Park, Keiko Kanzawa, Takayuki Katano, Takayuki Toshima +1 more | 2000-01-25 |
| 5964954 | Double-sided substrate cleaning apparatus and cleaning method using the same | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Akihiro Fujimoto, Takashi Takekuma +1 more | 1999-10-12 |
| 5932380 | Method of processing resist utilizing alkaline component monitoring | Yasunori Kawakami, Jae Hoon Park, Keiko Kanzawa, Takayuki Katano, Takayuki Toshima +1 more | 1999-08-03 |
| 5928390 | Vertical processing apparatus | Takayuki Toshima, Masami Akimoto, Eiji Yamaguchi, Junichi Kitano, Takayuki Katano +2 more | 1999-07-27 |
| 5876280 | Substrate treating system and substrate treating method | Junichi Kitano, Hiroshi Shinya, Takayuki Katano, Yasunori Kawakami, Fumihiko Kawano | 1999-03-02 |
| 5725664 | Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 1998-03-10 |
| 5686143 | Resist treating method | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Akihiro Fujimoto, Takashi Takekuma +1 more | 1997-11-11 |
| 5565034 | Apparatus for processing substrates having a film formed on a surface of the substrate | Mitsuhiro Nanbu, Naruaki Iida, Hideaki Gotou, Masanori Tateyama, Yuji Yoshimoto +6 more | 1996-10-15 |
| 5518542 | Double-sided substrate cleaning apparatus | Hiroyuki Matsukawa, Akira Yonemizu, Michiaki Matsushita, Akihiro Fujimoto, Takashi Takekuma +1 more | 1996-05-21 |