Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6097469 | Method of processing resist onto substrate and resist processing apparatus | Hidetami Yaegashi, Yasunori Kawakami, Jae Hoon Park, Takayuki Katano, Takayuki Toshima +1 more | 2000-08-01 |
| 6017663 | Method of processing resist utilizing alkaline component monitoring | Hidetami Yaegashi, Yasunori Kawakami, Jae Hoon Park, Takayuki Katano, Takayuki Toshima +1 more | 2000-01-25 |
| 5944894 | Substrate treatment system | Junichi Kitano, Takayuki Katano, Masami Akimoto, Norio Semba | 1999-08-31 |
| 5932380 | Method of processing resist utilizing alkaline component monitoring | Hidetami Yaegashi, Yasunori Kawakami, Jae Hoon Park, Takayuki Katano, Takayuki Toshima +1 more | 1999-08-03 |