Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368776 | Treatment apparatus and treatment method | Koji Harada, Junichi Nagata, Yasunori Kawakami, Masatoshi Kaneda, Yoshio Kimura +3 more | 2002-04-09 |
| 6338474 | Air feeder provided with by-pass bypassing cooling section, substrate processing apparatus including the same, and air supply method | — | 2002-01-15 |
| 6332724 | Substrate processing apparatus | Mitsuteru Yano, Kouzou Kanagawa, Issei Ueda, Masami Akimoto, Kazuhiko Ohi | 2001-12-25 |
| 6333003 | Treatment apparatus, treatment method, and impurity removing apparatus | Takayuki Katano, Junichi Kitano, Masami Akimoto | 2001-12-25 |
| 6268013 | Coating a resist film, with pretesting for particle contamination | Masami Akimoto, Kazutoshi Yoshioka, Kazuo Sakamoto | 2001-07-31 |
| 6217657 | Resist processing system having process solution deaeration mechanism | Yukio Kiba, Keizo Hasebe | 2001-04-17 |
| 6133981 | Processing system | — | 2000-10-17 |
| 6063439 | Processing apparatus and method using solution | Junichi Kitano, Takayuki Katano | 2000-05-16 |
| 6033475 | Resist processing apparatus | Keizo Hasebe, Hiroyuki Iino, Yoshio Kimura | 2000-03-07 |
| 6015066 | Liquid supplying device | Yoshio Kimura, Satoshi Morita, Yuji Matsuyama | 2000-01-18 |
| 5944894 | Substrate treatment system | Junichi Kitano, Takayuki Katano, Keiko Kanzawa, Masami Akimoto | 1999-08-31 |
| 5938847 | Method and apparatus for coating a film on an object being processed | Masami Akimoto, Kazutoshi Yoshioka, Kazuo Sakamoto | 1999-08-17 |
| 5866307 | Resist processing method and resist processing system | Yukio Kiba, Keizo Hasebe | 1999-02-02 |
| 5854953 | Method for developing treatment | — | 1998-12-29 |
| 5826129 | Substrate processing system | Keizo Hasebe, Shinji Nagashima, Masami Akimoto, Yoshio Kimura, Naruaki Iida +3 more | 1998-10-20 |