Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8518480 | Developing treatment method, program, computer storage medium and developing treatment system | Norifumi Sato, Tetsushi Miyamoto, Kazuhisa Hasebe | 2013-08-27 |
| 7387455 | Substrate processing device, substrate processing method, and developing device | Tetsutoshi Awamura, Keiichi Tanaka, Takahiro Okubo, Shuuichi Nishikido | 2008-06-17 |
| 6217657 | Resist processing system having process solution deaeration mechanism | Norio Semba, Keizo Hasebe | 2001-04-17 |
| 5939130 | Coating film forming method and coating film forming apparatus | Masatoshi Shiraishi, Kunie Ogata | 1999-08-17 |
| 5866307 | Resist processing method and resist processing system | Norio Semba, Keizo Hasebe | 1999-02-02 |