Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6503003 | Film forming method and film forming apparatus | Shuuichi Nishikido, Nobuo Konishi, Takayuki Toshima, Kazutoshi Yoshioka | 2003-01-07 |
| 6228561 | Film forming method and film forming apparatus | Shuuichi Nishikido, Nobuo Konishi, Takayuki Toshima, Kazutoshi Yoshioka | 2001-05-08 |
| 6217657 | Resist processing system having process solution deaeration mechanism | Yukio Kiba, Norio Semba | 2001-04-17 |
| 6063190 | Method of forming coating film and apparatus therefor | Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 2000-05-16 |
| 6033475 | Resist processing apparatus | Hiroyuki Iino, Norio Semba, Yoshio Kimura | 2000-03-07 |
| 5942035 | Solvent and resist spin coating apparatus | Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 1999-08-24 |
| 5866307 | Resist processing method and resist processing system | Yukio Kiba, Norio Semba | 1999-02-02 |
| 5826129 | Substrate processing system | Shinji Nagashima, Norio Semba, Masami Akimoto, Yoshio Kimura, Naruaki Iida +3 more | 1998-10-20 |
| 5658615 | Method of forming coating film and apparatus therefor | Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura, Masatoshi Deguchi +1 more | 1997-08-19 |
| 5374312 | Liquid coating system | Kiyohisa Tateyama, Yuji Yoshimoto, Yuji Matsuyama, Tetsuro Nakahara, Yoshio Kimura | 1994-12-20 |
| 5252137 | System and method for applying a liquid | Kiyohisa Tateyama | 1993-10-12 |