Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10008419 | Separation method, computer storage medium, and separation system | Shinji Okada, Masatoshi Shiraishi, Xavier Francois Brun, Charles Singleton, Kabirkumar Mirpuri | 2018-06-26 |
| 9484236 | Joining method and joining system | Shinji Okada, Masatoshi Shiraishi | 2016-11-01 |
| 9463612 | Joining method and joining system | Shinji Okada, Masatoshi Shiraishi | 2016-10-11 |
| 8899289 | Joint method, joint apparatus and joint system | Masatoshi Shiraishi, Shinji Okada | 2014-12-02 |
| 8846495 | Bonding system and bonding method | — | 2014-09-30 |
| 8707893 | Substrate treatment system, substrate treatment method, and non-transitory computer storage medium | Hideo Funakoshi, Toshichika Takei, Norifumi Sato, Wataru Kiyota, Daisuke Ishimaru +3 more | 2014-04-29 |
| 7517217 | Method and apparatus for heat processing of substrate | Eiichi Sekimoto, Koichi Asaka, Yuji Matsuyama | 2009-04-14 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Yuji Matsuyama, Takahiro Kitano, Takayuki Katano, Hidefumi Matsui +7 more | 2007-04-24 |
| 6969538 | Method for heat processing of substrate | Eiichi Sekimoto, Koichi Asaka, Yuji Matsuyama | 2005-11-29 |
| 6821550 | Apparatus and method for applying process solution | Kosuke Yoshihara | 2004-11-23 |
| 6659661 | Substrate processing apparatus | Eiichi Sekimoto | 2003-12-09 |
| 6473151 | Substrate processing apparatus | — | 2002-10-29 |
| 6466300 | Substrate processing apparatus | — | 2002-10-15 |
| 6281145 | Apparatus and method for applying process solution | Kosuke Yoshihara | 2001-08-28 |
| 6063190 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura +1 more | 2000-05-16 |
| 5942035 | Solvent and resist spin coating apparatus | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura +1 more | 1999-08-24 |
| 5658615 | Method of forming coating film and apparatus therefor | Keizo Hasebe, Akihiro Fujimoto, Hiroichi Inada, Hiroyuki Iino, Shinzi Kitamura +1 more | 1997-08-19 |
| 5580607 | Coating apparatus and method | Takashi Takekuma, Masaaki Murakami, Akihiro Fujimoto | 1996-12-03 |