Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11612017 | Substrate processing apparatus and substrate processing method | — | 2023-03-21 |
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2022-10-18 |
| 11469116 | Substrate processing apparatus and substrate processing method | Shoichiro Hidaka, Boui Ikeda, Kazuya Iwanaga, Masato Hayashi | 2022-10-11 |
| 11087983 | Thermal treatment apparatus, thermal treatment method, and non-transitory computer storage medium | Takeshi Saikusa, Hiroshi Seko | 2021-08-10 |
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Kenichi Shigetomi, Takeshi Saikusa, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2019-12-10 |
| 7868270 | Temperature control for performing heat process in coating/developing system for resist film | Jun Ookura, Hisakazu Nakayama | 2011-01-11 |
| 7755003 | Temperature control for performing heat process on resist film | Jun Ookura, Hisakazu Nakayama | 2010-07-13 |
| 7517217 | Method and apparatus for heat processing of substrate | Masatoshi Deguchi, Koichi Asaka, Yuji Matsuyama | 2009-04-14 |
| 6969538 | Method for heat processing of substrate | Masatoshi Deguchi, Koichi Asaka, Yuji Matsuyama | 2005-11-29 |
| 6659661 | Substrate processing apparatus | Masatoshi Deguchi | 2003-12-09 |
| 6573031 | Apparatus and method of thermal processing and method of pattern formation | Hiroshi Shinya, Kazuyoshi Mizumoto, Kazuhisa Hayashida | 2003-06-03 |
| 6185370 | Heating apparatus for heating an object to be processed | Mitsuhiro Tanoue | 2001-02-06 |