Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7868270 | Temperature control for performing heat process in coating/developing system for resist film | Eiichi Sekimoto, Hisakazu Nakayama | 2011-01-11 |
| 7755003 | Temperature control for performing heat process on resist film | Eiichi Sekimoto, Hisakazu Nakayama | 2010-07-13 |
| 7510611 | Coating film forming method and apparatus | Tomohide Minami, Shinichi Sugimoto, Takahiro Kitano, Hiroaki Kurishima | 2009-03-31 |
| 7488505 | Coating film forming method and system | Tomohide Minami, Shinichi Sugimoto, Takahiro Kitano, Hiroaki Kurishima | 2009-02-10 |
| 6973370 | Substrate processing apparatus and method for adjusting a substrate transfer position | Kazuhiko Ito, Kazutoshi Ishimaru, Michio Kinoshita, Yuichi Douki | 2005-12-06 |
| 6884294 | Coating film forming method and apparatus | Tomohide Minami, Shinichi Sugimoto, Takahiro Kitano, Hiroaki Kurishima | 2005-04-26 |
| 6776845 | Coating film forming method and system | Tomohide Minami, Shinichi Sugimoto, Takahiro Kitano, Hiroaki Kurishima | 2004-08-17 |
| 6686571 | Heat treatment unit, cooling unit and cooling treatment method | Koji Harada | 2004-02-03 |
| 6654668 | Processing apparatus, processing system, distinguishing method, and detecting method | Koji Harada, Hisakazu Nakayama | 2003-11-25 |
| 6644965 | Substrate processing apparatus and substrate processing method | Koji Harada | 2003-11-11 |
| 6620245 | Liquid coating apparatus with temperature controlling manifold | Seiki Ishida, Junichi Iwano, Michishige Saito | 2003-09-16 |
| 6507770 | Substrate processing system and substrate processing method | Masanori Tateyama, Kenichi Okubo | 2003-01-14 |
| 6461438 | Heat treatment unit, cooling unit and cooling treatment method | Koji Harada | 2002-10-08 |
| 6402509 | Substrate processing apparatus and substrate processing method | Koji Harada | 2002-06-11 |
| 6332751 | Transfer device centering method and substrate processing apparatus | Seiji Kozawa, Naruaki Iida | 2001-12-25 |