Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300475 | Substrate support and substrate processing apparatus | — | 2025-05-13 |
| 12288676 | Stage and substrate processing apparatus | Takayuki Ishii, Kazuya Nagaseki | 2025-04-29 |
| 11981993 | Forming method of component and substrate processing system | Kazuya Nagaseki, Shota Kaneko | 2024-05-14 |
| 11967487 | Forming method of component and plasma processing apparatus | Kazuya Nagaseki, Shota Kaneko | 2024-04-23 |
| 11919032 | Film forming apparatus and method for manufacturing part having film containing silicon | Takayuki Ishii, Kazuya Nagaseki | 2024-03-05 |
| 11764040 | Placing table and substrate processing apparatus | Shota Kaneko | 2023-09-19 |
| 11742183 | Plasma processing apparatus and control method | Ryuji Hisatomi, Chishio Koshimizu | 2023-08-29 |
| 11532461 | Substrate processing apparatus | Shota Kaneko, Shuhei Yamabe | 2022-12-20 |
| 11515125 | Upper electrode and plasma processing apparatus | — | 2022-11-29 |
| 11443922 | High frequency power supply member and plasma processing apparatus | Yousuke Nagahata | 2022-09-13 |
| 11201034 | Plasma processing apparatus and control method | Ryuji Hisatomi, Chishio Koshimizu | 2021-12-14 |
| 9613837 | Substrate processing apparatus and maintenance method thereof | Shigeru Senzaki, Daiki Satoh, Ken Horiuchi, Koji Ando, Shingo KOIWA | 2017-04-04 |
| 8821742 | Plasma etching method | Ryoichi Yoshida, Tetsuo Yoshida, Toshikatsu Wakaki, Hayato Aoyama, Akira Obi +1 more | 2014-09-02 |
| 8512510 | Plasma processing method and apparatus | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki +4 more | 2013-08-20 |
| 7506610 | Plasma processing apparatus and method | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki +4 more | 2009-03-24 |
| 7494561 | Plasma processing apparatus and method, and electrode plate for plasma processing apparatus | Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki +4 more | 2009-02-24 |
| 6620245 | Liquid coating apparatus with temperature controlling manifold | Seiki Ishida, Junichi Iwano, Jun Ookura | 2003-09-16 |