HA

Hayato Aoyama

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,123,254 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8821742 Plasma etching method Ryoichi Yoshida, Tetsuo Yoshida, Michishige Saito, Toshikatsu Wakaki, Akira Obi +1 more 2014-09-02