Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8821742 | Plasma etching method | Ryoichi Yoshida, Tetsuo Yoshida, Michishige Saito, Toshikatsu Wakaki, Hayato Aoyama +1 more | 2014-09-02 |
| 8475623 | Substrate processing method, system and program | Seiichi Kaise, Noriyuki Iwabuchi, Shigeaki Kato, Hiroshi Nakamura, Takeshi Yokouchi +1 more | 2013-07-02 |
| 8257601 | Substrate processing method, system and program | Seiichi Kaise, Noriyuki Iwabuchi, Shigeaki Kato, Hiroshi Nakamura, Takeshi Yokouchi +1 more | 2012-09-04 |
| 7555406 | Method of maintaining and automatically inspecting processing apparatus | Hisato Tanaka, Akira Iwami, Kazushi Tahara, Shigeaki Kato | 2009-06-30 |
| 7386423 | Methods of self-diagnosing software for driving processing apparatus | Hisato Tanaka, Akira Iwami, Kazushi Tahara, Shigeaki Kato | 2008-06-10 |
| 7245987 | Cluster tool and transfer control method | Kiyohito Iijima, Seiichi Kaise, Keiko Takahashi | 2007-07-17 |
| 7191082 | Method of inspecting substrate processing apparatus, and storage medium storing inspection program for executing the method | Hiroshi Nakamura | 2007-03-13 |
| 6970770 | Cluster tool and method for controlling transport | Kiyohito Iljima, Seiichi Kaise, Keiko Takahashi | 2005-11-29 |
| 6954716 | Method of automatically resetting processing apparatus | Hisato Tanaka, Akira Iwami, Kazushi Tahara, Shigeaki Kato | 2005-10-11 |