Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069548 | Substrate processing method and substrate processing system | Toru Nishino, Shigeru Ishizawa | 2021-07-20 |
| 10403525 | Substrate processing method and substrate processing system | Toru Nishino, Shigeru Ishizawa | 2019-09-03 |
| 8382910 | Cleaning method for substrate processing system, storage medium, and substrate processing system | Masahiro Numakura, Hiroaki Mochizuki | 2013-02-26 |
| 8145339 | Substrate processing apparatus and substrate transfer method adopted therein | Hiroaki Mochizuki, Masahiro Numakura | 2012-03-27 |
| 8055368 | Control device and control method of plasma processing system, and storage medium storing control program | Hiroaki Mochizuki | 2011-11-08 |
| 7846257 | Method for cleaning substrate processing apparatus, substrate processing apparatus, program and recording medium having program recorded therein | Hiroshi Nakamura | 2010-12-07 |
| 7681055 | Control device and method for a substrate processing apparatus | — | 2010-03-16 |
| 7245987 | Cluster tool and transfer control method | Seiichi Kaise, Keiko Takahashi, Akira Obi | 2007-07-17 |
| 6983195 | Semiconductor processing system and method of transferring workpiece | Shigeru Ishizawa | 2006-01-03 |