Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Norihiko Amikura, Hideyuki OSADA, Genichi Nanasaki, Masatomo KITA, Takashi Takizawa +1 more | 2025-04-29 |
| 11735448 | Container, container partition plate, substrate processing system, and substrate transfer method | Toshiaki TOYOMAKI, Masahiro Numakura, Yuki TAKEYAMA | 2023-08-22 |
| 11631607 | Carrier and jig | Toshiaki TOYOMAKI | 2023-04-18 |
| 10010913 | Purging apparatus and purging method for substrate storage container | Shigeki Amemiya, Genichi Nanasaki | 2018-07-03 |
| 9305817 | Method for purging a substrate container | Shigeki Amemiya, Shinobu Onodera, Hiroki Fujita, Masaru Nishino, Atsushi Rikukawa | 2016-04-05 |
| 8859046 | Substrate processing apparatus, control method adopted in substrate processing apparatus and program | Hiroshi Nakamura, Toshiyuki Kobayashi, Shinichiro Hayasaka | 2014-10-14 |
| 8475623 | Substrate processing method, system and program | Noriyuki Iwabuchi, Shigeaki Kato, Hiroshi Nakamura, Takeshi Yokouchi, Mariko Shibata +1 more | 2013-07-02 |
| 8257601 | Substrate processing method, system and program | Noriyuki Iwabuchi, Shigeaki Kato, Hiroshi Nakamura, Takeshi Yokouchi, Mariko Shibata +1 more | 2012-09-04 |
| 7854821 | Substrate processing apparatus | Hiroshi Nakamura | 2010-12-21 |
| 7245987 | Cluster tool and transfer control method | Kiyohito Iijima, Keiko Takahashi, Akira Obi | 2007-07-17 |
| 6970770 | Cluster tool and method for controlling transport | Kiyohito Iljima, Keiko Takahashi, Akira Obi | 2005-11-29 |