KI

Kiyohito Iljima

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,463,826 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6970770 Cluster tool and method for controlling transport Seiichi Kaise, Keiko Takahashi, Akira Obi 2005-11-29