Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10010913 | Purging apparatus and purging method for substrate storage container | Seiichi Kaise, Genichi Nanasaki | 2018-07-03 |
| 9305817 | Method for purging a substrate container | Seiichi Kaise, Shinobu Onodera, Hiroki Fujita, Masaru Nishino, Atsushi Rikukawa | 2016-04-05 |