Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Reo Kosaka, Matthew C. Gwinn, Luis Fernandez +3 more | 2023-07-04 |
| 11450506 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Reo Kosaka, Matthew C. Gwinn, Luis Fernandez +3 more | 2022-09-20 |
| 9653317 | Plasma processing method and plasma processing apparatus | Takao FUNAKUBO, Shinichi Kozuka, Ryosuke Niitsuma, Tsutomu Ito | 2017-05-16 |
| 9305817 | Method for purging a substrate container | Seiichi Kaise, Shigeki Amemiya, Shinobu Onodera, Hiroki Fujita, Atsushi Rikukawa | 2016-04-05 |
| 8986493 | Etching apparatus | Shigeru Tahara | 2015-03-24 |
| 8896210 | Plasma processing apparatus and method | Masatsugu Makabe, Nobuyuki Nagayama, Tatsuya Handa, Ryotaro Midorikawa, Keigo Kobayashi +1 more | 2014-11-25 |
| 8790489 | Substrate processing apparatus and substrate processing method | Masanobu Honda, Kazuhiro Kubota, Yoshinobu Ooya | 2014-07-29 |
| 8361275 | Etching apparatus | Shigeru Tahara | 2013-01-29 |
| 8252192 | Method of pattern etching a dielectric film while removing a mask layer | Yao-Sheng Lee, Vaidyanathan Balasubramaniam, Kelvin Zin | 2012-08-28 |
| 8190023 | Optical communication device, optical communication system, optical output control method and program | — | 2012-05-29 |
| 7998872 | Method for etching a silicon-containing ARC layer to reduce roughness and CD | Vinh Luong, Vaidyanathan Balasubramaniam | 2011-08-16 |
| 7674393 | Etching method and apparatus | Shigeru Tahara | 2010-03-09 |
| 7637269 | Low damage method for ashing a substrate using CO2/CO-based process | Kelvin Zin, Chong Hwan Chu, Yannick Feurprier | 2009-12-29 |
| 7279427 | Damage-free ashing process and system for post low-k etch | Douglas M. Trickett | 2007-10-09 |
| 6986851 | Dry developing method | Akinori Kitamura, Vaidya Balasubramaniam, Koichiro Inazawa | 2006-01-17 |
| 6594046 | Level-flattening circuit for WDM optical signals | — | 2003-07-15 |
| 5963685 | Cross-connection of wavelength-division-multiplexed high speed optical channels | — | 1999-10-05 |