Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8896210 | Plasma processing apparatus and method | Masaru Nishino, Masatsugu Makabe, Nobuyuki Nagayama, Ryotaro Midorikawa, Keigo Kobayashi +1 more | 2014-11-25 |
| 8758551 | Substrate processing apparatus and electrode structure | — | 2014-06-24 |
| 8480849 | Substrate processing apparatus and electrode structure | — | 2013-07-09 |
| 8282770 | Substrate processing apparatus and electrode structure | — | 2012-10-09 |
| 7718005 | Film forming equipment and film forming method | Yasushi Aiba | 2010-05-18 |