Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11810792 | Etching method and substrate processing apparatus | Takanori Eto, Sho SAITOH | 2023-11-07 |
| 8896210 | Plasma processing apparatus and method | Masaru Nishino, Nobuyuki Nagayama, Tatsuya Handa, Ryotaro Midorikawa, Keigo Kobayashi +1 more | 2014-11-25 |