Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394632 | Plasma processing method and plasma processing system | Atsuki Hashimoto, Yoshimitsu Kon | 2025-08-19 |
| 11810792 | Etching method and substrate processing apparatus | Takanori Eto, Masatsugu Makabe | 2023-11-07 |