Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394632 | Plasma processing method and plasma processing system | Atsuki Hashimoto, Sho SAITOH | 2025-08-19 |
| 11264248 | Etching method and substrate processing apparatus | Atsushi UTO, Lifu LI, Tomonori Miwa | 2022-03-01 |
| 11121001 | Method of etching, device manufacturing method, and plasma processing apparatus | Satoshi Yamada, Koki CHINO | 2021-09-14 |
| 8216485 | Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium | Yoshinobu Hayakawa | 2012-07-10 |
| 8128831 | Plasma etching method and computer-readable storage medium | Manabu Sato, Yoshiki Igarashi, Masanobu Honda | 2012-03-06 |