Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198937 | Etching method and plasma processing apparatus | Hikoichiro Sasaki | 2025-01-14 |
| 11121001 | Method of etching, device manufacturing method, and plasma processing apparatus | Satoshi Yamada, Yoshimitsu Kon | 2021-09-14 |