Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198937 | Etching method and plasma processing apparatus | Koki CHINO | 2025-01-14 |
| 10115567 | Plasma processing apparatus | Taichi Hirano, Ken Yoshida, Satoshi Yamada, Yoshinobu Hayakawa, Junji Ishibashi +1 more | 2018-10-30 |
| 8609547 | Plasma etching method and computer-readable storage medium | Kosei Ueda | 2013-12-17 |
| 8129282 | Plasma etching method and computer-readable storage medium | Kosei Ueda | 2012-03-06 |