Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488807 | Plasma processing apparatus, processing method, and upper electrode structure | Kota SHIHOMMATSU, Junichi Sasaki, Hidetoshi Hanaoka | 2022-11-01 |
| 10115567 | Plasma processing apparatus | Taichi Hirano, Ken Yoshida, Hikoichiro Sasaki, Satoshi Yamada, Yoshinobu Hayakawa +1 more | 2018-10-30 |
| 10056230 | Power supply system, plasma processing apparatus and power supply control method | Taichi Hirano, Keiki Ito, Kunihiro Sato | 2018-08-21 |
| 9567437 | Production method of cyclic polyarylene sulfide | Tomoyuki Odashima, Syunsuke Horiuchi, Naoto Kumagai, Koji Yamauchi | 2017-02-14 |