KS

Kota SHIHOMMATSU

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Rifu, JP: #1,311 of 2,101 inventorsTop 65%
Overall (All Time): #2,690,445 of 4,157,543Top 65%
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Patent #TitleCo-InventorsDate
11488807 Plasma processing apparatus, processing method, and upper electrode structure Junji Ishibashi, Junichi Sasaki, Hidetoshi Hanaoka 2022-11-01