Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923171 | Plasma processing apparatus and plasma processing method | Junichi Sasaki, Yasuharu Sasaki, Tomohiko Akiyama | 2024-03-05 |
| 11705308 | Plasma processing apparatus | Shintaro Ikeda, Naoki Tamaru | 2023-07-18 |
| 11664198 | Plasma processing apparatus | Hirofumi Ohta, Ayuta Suzuki | 2023-05-30 |
| 11488807 | Plasma processing apparatus, processing method, and upper electrode structure | Kota SHIHOMMATSU, Junji Ishibashi, Junichi Sasaki | 2022-11-01 |
| 11417500 | Plasma processing apparatus and plasma processing method | Junichi Sasaki, Yasuharu Sasaki, Tomohiko Akiyama | 2022-08-16 |
| 10854431 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2020-12-01 |
| 10847348 | Plasma processing apparatus and plasma processing method | Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Yohei Uchida +3 more | 2020-11-24 |
| 10580622 | Plasma processing apparatus | — | 2020-03-03 |
| 10546727 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2020-01-28 |
| 10529539 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +10 more | 2020-01-07 |
| 9966233 | Plasma processing apparatus | — | 2018-05-08 |
| 9490105 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2016-11-08 |
| 9330891 | Plasma processing method and plasma processing apparatus | Ryo Nonaka, Masanori Sato, Natsuki Yabumoto, Takamitsu TAKAYAMA, Akitoshi Harada +1 more | 2016-05-03 |
| 9251998 | Plasma processing apparatus | — | 2016-02-02 |
| 8999068 | Chamber cleaning method | Masanobu Honda, Taichi Hirano, Takanori Mimura, Manabu Iwata, Taketoshi Okajo | 2015-04-07 |
| 8603293 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2013-12-10 |
| 8513563 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Chishio Koshimizu, Yoshinobu Hayakawa, Manabu Iwata, Satoshi Tanaka | 2013-08-20 |
| 8138445 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Chishio Koshimizu, Yoshinobu Hayakawa, Manabu Iwata, Satoshi Tanaka | 2012-03-20 |
| 8034213 | Plasma processing apparatus and plasma processing method | Naoki Matsumoto, Yoshinobu Hayakawa, Noriaki Kodama, Chishio Koshimizu, Manabu Iwata +1 more | 2011-10-11 |
| 7988816 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2011-08-02 |
| 7951262 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +10 more | 2011-05-31 |
| 5583858 | Asynchronous transfer mode switching device | — | 1996-12-10 |