Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211676 | Measurement system, measurement method, and plasma processing device | Hidefumi Matsui, Atsushi Kubo | 2025-01-28 |
| 12027344 | Film forming apparatus | Shinya Iwashita, Takahiro SHINDO, Kazuki DEMPOH, Tatsuo Matsudo, Yasushi Morita +2 more | 2024-07-02 |
| 11664198 | Plasma processing apparatus | Hirofumi Ohta, Hidetoshi Hanaoka | 2023-05-30 |
| 10847348 | Plasma processing apparatus and plasma processing method | Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Yohei Uchida +3 more | 2020-11-24 |
| 10734221 | Method of manufacturing semiconductor device and method of forming metal oxide film | Taiki KATO, Hisashi Higuchi, Kosuke Yamamoto, Kazuyoshi Matsuzaki, Yuji SESHIMO +2 more | 2020-08-04 |
| 10643839 | Film forming apparatus and film forming method | Kosuke Yamamoto, Kazuyoshi Matsuzaki, Munehito KAGAYA, Tsuyoshi Moriya, Tadashi MITSUNARI +1 more | 2020-05-05 |
| 10121680 | Substrate processing apparatus | Munehito KAGAYA, Kosuke Yamamoto, Tsuyoshi Moriya, Kazuyoshi Matsuzaki | 2018-11-06 |
| 9441292 | Etching method, etching apparatus, and ring member | Songyun Kang, Tsuyoshi Moriya, Nobutoshi TERASAWA, Yoshiaki Okabe | 2016-09-13 |
| 9202731 | Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein | Shigeru Kasai, Ikuo Sawada, Naoki Shindo, Masatake Yoneda, Kazuhiro Ooya | 2015-12-01 |
| 8945413 | Etching method, etching apparatus, and ring member | Songyun Kang, Tsuyoshi Moriya, Nobutoshi TERASAWA, Yoshiaki Okabe | 2015-02-03 |