Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664200 | Placing table, positioning method of edge ring and substrate processing apparatus | Yasuharu Sasaki, Mitsuaki Sato | 2023-05-30 |
| 10847348 | Plasma processing apparatus and plasma processing method | Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Yohei Uchida, Ayuta Suzuki +3 more | 2020-11-24 |
| 7678225 | Focus ring for semiconductor treatment and plasma treatment device | Takaaki Nezu, Katsumi Horiguchi, Daisuke Hayashi | 2010-03-16 |
| D490450 | Exhaust ring for semiconductor equipment | Daisuke Hayashi | 2004-05-25 |