Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293937 | Plasma processing apparatus and mounting table thereof | Jun Hirose | 2025-05-06 |
| 12046457 | Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method | Yasuharu Sasaki, Shoichiro Matsuyama | 2024-07-23 |
| 11984300 | Plasma processing apparatus | Takehiro Tanikawa, Shuhei Yamabe, Yasuharu Sasaki | 2024-05-14 |
| 11942357 | Workpiece placement apparatus and processing apparatus | Naoki Sugawa, Katsushi Abe, Tsuyoshi Hida | 2024-03-26 |
| 11825589 | Plasma processing apparatus and plasma processing method | Tetsuji Sato, Shojiro Yahata, Taira Takase | 2023-11-21 |
| 11795346 | Polishing liquid composition for silicon oxide film | — | 2023-10-24 |
| 11717912 | Capillary guide device and wire bonding apparatus | — | 2023-08-08 |
| D992614 | Focus ring | Yasuharu Sasaki, Masato Takayama | 2023-07-18 |
| D992615 | Focus ring | Yasuharu Sasaki, Hikaru Abe, Tomoya Ujiie | 2023-07-18 |
| 11600471 | Substrate support, plasma processing apparatus, and focus ring | Yasuharu Sasaki | 2023-03-07 |
| 11501995 | Plasma processing apparatus and mounting table thereof | Jun Hirose | 2022-11-15 |
| 11495445 | Plasma processing apparatus and plasma processing method | Yusuke Mizuno | 2022-11-08 |
| 11410871 | Workpiece placement apparatus and processing apparatus | Naoki Sugawa, Katsushi Abe, Tsuyoshi Hida | 2022-08-09 |
| 11032899 | Plasma processing apparatus and plasma processing method | Tetsuji Sato, Shojiro Yahata, Taira Takase | 2021-06-08 |
| 11004822 | Wire clamp apparatus calibration method and wire bonding apparatus | Naoya Taira | 2021-05-11 |
| 10886108 | Power feed structure and plasma processing apparatus | Yasuharu Sasaki | 2021-01-05 |
| 10865368 | Rinse agent composition for silicon wafers | — | 2020-12-15 |
| 10847348 | Plasma processing apparatus and plasma processing method | Toshiya Tsukahara, Shuhei Yamabe, Kota Yachi, Tetsuji Sato, Ayuta Suzuki +3 more | 2020-11-24 |
| 10199241 | Gas supply device and substrate processing apparatus | — | 2019-02-05 |
| 9887108 | Gas supply device and substrate processing apparatus | — | 2018-02-06 |
| 9209060 | Mounting table structure and method of holding focus ring | — | 2015-12-08 |
| 9169558 | Fluid control apparatus | Jun Hirose, Kazuyuki Tezuka, Mutsunori Koyomogi, Takahiro Matsuda, Ryousuke Dohi +2 more | 2015-10-27 |
| 9145605 | Thin-film forming method and thin-film forming apparatus | Takeshi Masuda, Takuya Ideno, Masahiko Kajinuma, Nobuhiro Odajima, Koukou Suu | 2015-09-29 |
| 8905747 | Bur removing apparatus | Tomohiro Hangai | 2014-12-09 |
| 8883632 | Manufacturing method and manufacturing apparatus of device | Youhei Endo, Shuji Kodaira, Yuta SAKAMOTO, Junichi Hamaguchi, Yasushi Higuchi +4 more | 2014-11-11 |