Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11825589 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Shojiro Yahata | 2023-11-21 |
| 11705356 | Mounting table and plasma processing apparatus | Kyouhei Yamamoto | 2023-07-18 |
| 11032899 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Shojiro Yahata | 2021-06-08 |
| 10727101 | Mounting table and plasma processing apparatus | Kyouhei Yamamoto | 2020-07-28 |
| 8117986 | Apparatus for an improved deposition shield in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2012-02-21 |
| 8118936 | Method and apparatus for an improved baffle plate in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2012-02-21 |
| 7811428 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Kouji Mitsuhashi, Hidehito Saigusa, Hiroyuki Nakayama | 2010-10-12 |
| 7678226 | Method and apparatus for an improved bellows shield in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2010-03-16 |
| 7585385 | Plasma processing apparatus, control method thereof and program for performing same | Satoshi Yamazaki | 2009-09-08 |
| 7566368 | Method and apparatus for an improved upper electrode plate in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2009-07-28 |
| 7204912 | Method and apparatus for an improved bellows shield in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2007-04-17 |
| 7166166 | Method and apparatus for an improved baffle plate in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2007-01-23 |
| 7166200 | Method and apparatus for an improved upper electrode plate in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2007-01-23 |
| 7163585 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Kouji Mitsuhashi, Hidehito Saigusa, Hiroyuki Nakayama | 2007-01-16 |
| 7137353 | Method and apparatus for an improved deposition shield in a plasma processing system | Hidehito Saigusa, Kouji Mitsuhashi, Hiroyuki Nakayama | 2006-11-21 |
| 6798519 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Kouji Mitsuhashi, Hidehito Saigusa, Hiroyuki Nakayama | 2004-09-28 |
| 6790289 | Method of cleaning a plasma processing apparatus | Nobuyuki Nagayama, Kouji Mitsuhashi, Hiroyuki Nakayama | 2004-09-14 |