Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8877002 | Internal member of a plasma processing vessel | Hiroyuki Nakayama, Nobuyuki Nagayama, Tsuyoshi Moriya, Hiroshi Nagaike | 2014-11-04 |
| 8739732 | Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member | Nobuyuki Nagayama, Hiroyuki Nakayama | 2014-06-03 |
| 8449715 | Internal member of a plasma processing vessel | Hiroyuki Nakayama, Nobuyuki Nagayama, Tsuyoshi Moriya, Hiroshi Nagaike | 2013-05-28 |
| 8117986 | Apparatus for an improved deposition shield in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2012-02-21 |
| 8118936 | Method and apparatus for an improved baffle plate in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2012-02-21 |
| 8058186 | Components for substrate processing apparatus and manufacturing method thereof | Tsuyoshi Moriya, Akira Uedono | 2011-11-15 |
| 8057600 | Method and apparatus for an improved baffle plate in a plasma processing system | Shinya Nishimoto, Hiroyuki Nakayama | 2011-11-15 |
| 7942975 | Ceramic sprayed member-cleaning method | Tsuyoshi Moriya | 2011-05-17 |
| 7892361 | In-chamber member, a cleaning method therefor and a plasma processing apparatus | Nobuyuki Nagayama, Hiroyuki Nakayama | 2011-02-22 |
| 7811428 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2010-10-12 |
| 7780786 | Internal member of a plasma processing vessel | Hiroyuki Nakayama, Nobuyuki Nagayama, Tsuyoshi Moriya, Hiroshi Nagaike | 2010-08-24 |
| 7678226 | Method and apparatus for an improved bellows shield in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2010-03-16 |
| 7566379 | Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system | Shinya Nishimoto, Hiroyuki Nakayama | 2009-07-28 |
| 7566368 | Method and apparatus for an improved upper electrode plate in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2009-07-28 |
| 7481903 | Processing device and method of maintaining the device, mechanism and method for assembling processing device parts, and lock mechanism and method for locking the lock mechanism | Shigeru Senzaki, Toshiki Sasaki, Tadashi Aoto, Nobuyuki Nagayama | 2009-01-27 |
| 7364798 | Internal member for plasma-treating vessel and method of producing the same | Yoshio Harada, Junichi Takeuchi, Nobuyuki Nagayama | 2008-04-29 |
| 7282112 | Method and apparatus for an improved baffle plate in a plasma processing system | Shinya Nishimoto, Hiroyuki Nakayama | 2007-10-16 |
| 7204912 | Method and apparatus for an improved bellows shield in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2007-04-17 |
| 7166200 | Method and apparatus for an improved upper electrode plate in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2007-01-23 |
| 7166166 | Method and apparatus for an improved baffle plate in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2007-01-23 |
| 7163585 | Method and apparatus for an improved optical window deposition shield in a plasma processing system | Shinya Nishimoto, Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2007-01-16 |
| 7147749 | Method and apparatus for an improved upper electrode plate with deposition shield in a plasma processing system | Shinya Nishimoto, Hiroyuki Nakayama | 2006-12-12 |
| 7137353 | Method and apparatus for an improved deposition shield in a plasma processing system | Hidehito Saigusa, Taira Takase, Hiroyuki Nakayama | 2006-11-21 |
| 6899786 | Processing device and method of maintaining the device, mechanism and method for assembling processing device part, and lock mechanism and method for locking the lock mechanism | Shigeru Senzaki, Toshiki Sasaki, Tadashi Aoto, Nobuyuki Nagayama | 2005-05-31 |
| 6884516 | Internal member for plasma-treating vessel and method of producing the same | Yoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Nobuyuki Nagayama | 2005-04-26 |