Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9905433 | Manufacturing method of semiconductor device including a nitride semiconductor layer | Shinya TAKASHIMA, Katsunori Ueno, Masaharu Edo | 2018-02-27 |
| 8058186 | Components for substrate processing apparatus and manufacturing method thereof | Tsuyoshi Moriya, Kouji Mitsuhashi | 2011-11-15 |
| 6919563 | Defect evaluation apparatus utilizing positrons | Atsushi Ogura | 2005-07-19 |