Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11462444 | Substrate container, controller, and abnormality detection method | — | 2022-10-04 |
| 11158490 | Processing method in processing apparatus using halogen-based gas | Tomohito MATSUO | 2021-10-26 |
| 10895014 | Processing method and processing apparatus of metal member | — | 2021-01-19 |
| 10643825 | Particle generation preventing method and vacuum apparatus | Takashi Tetsuka, Masatomo KITA, Chihiro Sato, Naoya Suenaga | 2020-05-05 |
| 9627184 | Cleaning method of processing apparatus, program for performing the method, and storage medium for storing the program | Tsuyoshi Moriya, Hiroyuki Nakayama | 2017-04-18 |
| 8877002 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Nobuyuki Nagayama, Tsuyoshi Moriya | 2014-11-04 |
| 8647442 | Cleaning substrate and cleaning method | Yohei Yamazawa, Masashi Saito, Masanobu Honda | 2014-02-11 |
| 8608422 | Particle sticking prevention apparatus and plasma processing apparatus | Tsuyoshi Moriya, Teruyuki Hayashi, Kaoru Fujihara | 2013-12-17 |
| 8578952 | Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method | Tsuyoshi Moriya | 2013-11-12 |
| 8531664 | Particle number measurement method | — | 2013-09-10 |
| 8449715 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Nobuyuki Nagayama, Tsuyoshi Moriya | 2013-05-28 |
| 8337629 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Tsuyoshi Moriya, Hiroyuki Nakayama | 2012-12-25 |
| 8323414 | Particle removal apparatus and method and plasma processing apparatus | Tsuyoshi Moriya | 2012-12-04 |
| 8243265 | Method and apparatus for detecting foreign materials and storage medium | Tsuyoshi Moriya, Hideaki Yakushiji | 2012-08-14 |
| 8206513 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Tsuyoshi Moriya, Hiroyuki Nakayama | 2012-06-26 |
| 8172949 | Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program | Tomoyuki Kudo, Jun Ozawa, Hiroshi Nakamura, Kazunori Kazama, Tsuyoshi Moriya +1 more | 2012-05-08 |
| 8137473 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Tsuyoshi Moriya, Hiroyuki Nakayama | 2012-03-20 |
| 8052798 | Particle removal apparatus and method and plasma processing apparatus | Tsuyoshi Moriya | 2011-11-08 |
| 8043971 | Plasma processing apparatus, ring member and plasma processing method | Yasuharu Sasaki, Tsuyoshi Moriya | 2011-10-25 |
| 7976637 | Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method | Tsuyoshi Moriya | 2011-07-12 |
| 7780786 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Nobuyuki Nagayama, Tsuyoshi Moriya | 2010-08-24 |
| 7756599 | Substrate processing apparatus, program for performing operation and control method thereof, and computer readable storage medium storing the program | Tomoyuki Kudo, Jun Ozawa, Hiroshi Nakamura, Kazunori Kazama, Tsuyoshi Moriya +1 more | 2010-07-13 |
| 7651586 | Particle removal apparatus and method and plasma processing apparatus | Tsuyoshi Moriya | 2010-01-26 |
| 7560083 | Method for removing water molecules from vacuum chamber, program for executing the method, and storage medium storing the program | Tsuyoshi Moriya, Hiroyuki Nakayama | 2009-07-14 |
| 7347006 | Processing apparatus and method for removing particles therefrom | Tsuyoshi Moriya, Hiroyuki Nakayama, Kikuo Okuyama, Manabu Shimada | 2008-03-25 |