Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341046 | Transfer apparatus and transfer method | Norihiko Amikura | 2025-06-24 |
| 12285786 | Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method | Norihiko Amikura, Hideyuki OSADA, Genichi Nanasaki, Seiichi Kaise, Takashi Takizawa +1 more | 2025-04-29 |
| 12198952 | Substrate processing apparatus | Masahiro DOGOME | 2025-01-14 |
| 12191188 | Transfer device, transfer system, and end effector | Norihiko Amikura, Masahiro DOGOME, Takami FUKASAWA, Daisuke Hayashi, Toshiaki TOYOMAKI | 2025-01-07 |
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Toshiyuki MAKABE, Shin Matsuura, Nobutaka SASAKI, Gyeong min PARK | 2024-12-10 |
| 12131937 | Transfer system, transfer device, and transfer method | Norihiko Amikura, Toshiaki TOYOMAKI | 2024-10-29 |
| 12125738 | Storage module, substrate processing system, and method of transferring consumable member | Norihiko Amikura | 2024-10-22 |
| 12080572 | Substrate processing apparatus | Masahiro DOGOME | 2024-09-03 |
| 11994234 | Gate valve and driving method | Norihiko Amikura | 2024-05-28 |
| 11955356 | Processing system and transfer method | Norihiko Amikura | 2024-04-09 |
| 11948816 | Transfer apparatus | Masahiro DOGOME | 2024-04-02 |
| 11862506 | Substrate processing system, vacuum substrate transfer module, and substrate transfer method | Norihiko Amikura | 2024-01-02 |
| 11791180 | Substrate transfer system and load lock module | Norihiko Amikura, Masahiro DOGOME | 2023-10-17 |
| 10643825 | Particle generation preventing method and vacuum apparatus | Takashi Tetsuka, Hiroshi Nagaike, Chihiro Sato, Naoya Suenaga | 2020-05-05 |