Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198952 | Substrate processing apparatus | Masatomo KITA | 2025-01-14 |
| 12191188 | Transfer device, transfer system, and end effector | Norihiko Amikura, Masatomo KITA, Takami FUKASAWA, Daisuke Hayashi, Toshiaki TOYOMAKI | 2025-01-07 |
| 12080572 | Substrate processing apparatus | Masatomo KITA | 2024-09-03 |
| 11969879 | Substrate accommodating device and processing system | — | 2024-04-30 |
| 11972933 | Plasma processing apparatus and substrate support of plasma processing apparatus | — | 2024-04-30 |
| 11948816 | Transfer apparatus | Masatomo KITA | 2024-04-02 |
| 11791180 | Substrate transfer system and load lock module | Norihiko Amikura, Masatomo KITA | 2023-10-17 |
| 11728205 | Device for transferring substrate, system for processing substrate, and method of processing substrate | — | 2023-08-15 |
| 11257707 | Substrate gripping mechanism, substrate transfer device, and substrate processing system | Keisuke Kondoh | 2022-02-22 |
| 10133266 | Conveyance robot replacement apparatus and conveyance robot replacement method | Hiroshi IKARI, Toshiaki TOYOMAKI, Genichi Nanasaki, Takehiro Shindo | 2018-11-20 |
| 9805960 | Substrate conveyance method | Takehiro Shindo, Tadashi Shioneri | 2017-10-31 |