Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420627 | Vehicle | — | 2025-09-23 |
| 11554493 | Transfer apparatus | Shota Shimazaki | 2023-01-17 |
| 11545381 | Substrate transporting method and substrate processing system | — | 2023-01-03 |
| 11257707 | Substrate gripping mechanism, substrate transfer device, and substrate processing system | Masahiro DOGOME | 2022-02-22 |
| 10906756 | Substrate processing device | Shinji Wakabayashi | 2021-02-02 |
| 10896835 | Processing system | Atsushi Kawabe | 2021-01-19 |
| 10403529 | Carrier transport device and carrier transport method | Shinji Wakabayashi | 2019-09-03 |
| 10347510 | Substrate transfer chamber, substrate processing system, and method for replacing gas in substrate transfer chamber | — | 2019-07-09 |
| 10229847 | Substrate transfer chamber and container connecting mechanism with lid opening mechanisms | Shinji Wakabayashi, Sensho Kobayashi | 2019-03-12 |
| 10134619 | Connecting mechanism and connecting method of substrate container | Norihiko Tsuji | 2018-11-20 |
| 10128134 | Substrate transfer method and processing system | — | 2018-11-13 |
| 9732881 | Gate valve and substrate processing system | Shinji Wakabayashi, Norihiko Tsuji | 2017-08-15 |
| 9455166 | Substrate transporting apparatus, substrate delivery position confirming method, and substrate processing system | — | 2016-09-27 |
| 9448063 | Method and apparatus for detecting position of substrate transfer device, and storage medium | — | 2016-09-20 |
| 8740535 | Delivery position aligning method for use in vacuum processing apparatus, vacuum processing apparatus and computer storage medium | Hiroshi Koizumi | 2014-06-03 |
| 8395136 | Positional deviation detection apparatus and process system employing the same | — | 2013-03-12 |
| 8382088 | Substrate processing apparatus | — | 2013-02-26 |
| 8382938 | Gate valve cleaning method and substrate processing system | Tsuyoshi Moriya, Hiroyuki Nakayama, Hiroki Oka | 2013-02-26 |
| 8326468 | Substrate transfer apparatus, substrate transfer module, substrate transfer method and computer readable storage medium | — | 2012-12-04 |
| 8280545 | Vacuum processing apparatus and method, and storage medium for executing the method | — | 2012-10-02 |
| 8113757 | Intermediate transfer chamber, substrate processing system, and exhaust method for the intermediate transfer chamber | Tsuyoshi Moriya, Hiroyuki Nakayama, Hiroki Oka | 2012-02-14 |
| 8048235 | Gate valve cleaning method and substrate processing system | Tsuyoshi Moriya, Hiroyuki Nakayama, Hiroki Oka | 2011-11-01 |
| 7942622 | Transfer/alignment method in vacuum processing apparatus, vacuum processing apparatus and computer storage medium | Hiroshi Koizumi | 2011-05-17 |
| 7361920 | Substrate processing apparatus and transfer positioning method thereof | — | 2008-04-22 |
| D556157 | Load-lock chamber | Hiroki Oka, Makoto Tashiro | 2007-11-27 |