Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7286890 | Transfer apparatus for target object | Wataru Machiyama, Shigeru Ishizawa, Hiroshi Koizumi, Tsutomu Hiroki | 2007-10-23 |
| 7198251 | Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same | — | 2007-04-03 |
| 7129147 | Delivery position aligning method for use in a transfer system and a processing system employing the method | Motohiro Kumagai | 2006-10-31 |
| D527751 | Transfer-chamber | Hiroki Oka, Hiroshi Narushima | 2006-09-05 |
| 7018162 | Articulated carrying device | — | 2006-03-28 |
| 6950721 | Positioning substrate for semiconductor process | Makoto Tashiro, Hiroaki Saeki | 2005-09-27 |
| 6699003 | Carrying device | Hiroaki Saeki | 2004-03-02 |
| 6450757 | Conveyor system | Hiroaki Saeki | 2002-09-17 |
| 6328864 | Vacuum processing apparatus | Shigeru Ishizawa, Yoshiaki Sasaki, Tetsuo Yoshida | 2001-12-11 |