Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D766850 | Wafer holder for manufacturing semiconductor | Eisuke Morisaki, Hirokatsu Kobayashi, Masayuki Harashima, Yukio Sano | 2016-09-20 |
| 7837425 | Transportation apparatus and drive mechanism | Hiroaki Saeki, Shigeru Ishizawa, Takehiro Shindo, Tsutomu Hiroki | 2010-11-23 |
| 7406360 | Method for detecting transfer shift of transfer mechanism and semiconductor processing equipment | — | 2008-07-29 |
| D562524 | Wafer transfer apparatus | Tsutomu Hiroki, Takehiro Shindo | 2008-02-19 |
| 7286890 | Transfer apparatus for target object | Shigeru Ishizawa, Hiroshi Koizumi, Tsutomu Hiroki, Keisuke Kondoh | 2007-10-23 |