Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12065732 | Film forming method and film forming apparatus | Masayuki Harashima, Yukio Sano, Michikazu Nakamura | 2024-08-20 |
| 10689759 | Film forming apparatus | Masayuki Harashima | 2020-06-23 |
| D766850 | Wafer holder for manufacturing semiconductor | Eisuke Morisaki, Wataru Machiyama, Masayuki Harashima, Yukio Sano | 2016-09-20 |
| 8696814 | Film deposition apparatus and film deposition method | Eisuke Morisaki, Jun Yoshikawa, Ikuo Sawada, Tsunenobu Kimoto, Noriaki Kawamoto +1 more | 2014-04-15 |
| 8440270 | Film deposition apparatus and method | Eisuke Morisaki, Jun Yoshikawa | 2013-05-14 |
| 8328943 | Film forming apparatus and method | Eisuke Morisaki, Masayuki Harashima | 2012-12-11 |
| 7713886 | Film forming apparatus, film forming method, program and storage medium | Tetsuya Nakano, Masato Koizumi | 2010-05-11 |
| 7043827 | Device for installing rivets on rivet holding body | Masatoshi Ohuchi | 2006-05-16 |
| 6924231 | Single wafer processing method and system for processing semiconductor | Takeshi Sakuma | 2005-08-02 |
| 6796754 | Chip collecting apparatus for tip dresser | Kiyotaka Shibata | 2004-09-28 |