Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021717 | Film formation method, cleaning method and film formation apparatus | Seishi Murakami, Masaki Koizumi, Hiroaki Ashizawa | 2011-09-20 |
| 7713886 | Film forming apparatus, film forming method, program and storage medium | Hirokatsu Kobayashi, Tetsuya Nakano | 2010-05-11 |
| 6489208 | Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline silicon | Kazuya Okubo, Tsuyoshi Takahashi, Tsuyoshi Hashimoto, Kimihiro Matsuse | 2002-12-03 |
| 6404021 | Laminated structure and a method of forming the same | Kazuya Okubo, Tsuyoshi Takahashi, Tsuyoshi Hashimoto, Kimihiro Matsuse | 2002-06-11 |
| 6042653 | Susceptor for bearing an object to be processed thereon | Sumi Tanaka, Nobutaka Nakajima | 2000-03-28 |